Introduction
The C. Kenneth and Dianne Harris Wright Virginia Microelectronics Center (VMC) is housed in the College of Engineering (West Hall) on VCU’s Monroe Park Campus. The VMC is a shared research center providing principal investigators, students and industrial researchers training, access and technical support for their project tasks. The VMC includes more than 8,000 square feet of Class-100 and Class-1000 cleanroom space and a suite of micro- and nano-fabrication state-of-the-art tools. The bay and chase cleanroom facility is divided into three main sections: lithography, etching and deposition and sample prep. Each of these sections includes specialty equipment that provides manufacturing capabilities for researchers across many research domains. There are additional spaces connected to the VMC that are used for equipment modifications, training, process monitoring, and additional process-related tasks. All equipment and cleanroom space is maintained by expert staff. Adjacent to the VMC is the Nanomaterials Core Characterization Facility (NCC), which includes additional equipment that complements VMC’s operation. To schedule a tour of the VMC or an appointment with VMC staff, please contact us.
Focus Areas
Since its inception nearly twenty years ago, the VMC has provided technical support for research efforts that make their way into numerous application spaces. These projects are sponsored by federal agencies (the National Science Foundation, the National Institutes of Health and the U.S. Department of Defense, to name a few) as well as industry. Examples include nanoelectronic and nanophotonic devices, micro and nano-electromechanical systems, drug discovery, microfluidics, flexible electronics, bio-electronics and nano-bio interfaces. To schedule a consultation with VMC staff, please contact us.