Equipment

E-beam and thermal deposition system

E-beam and thermal deposition system

Atomic Layer Deposition

Atomic Layer Deposition

ATC-Orion 5 UHV with load lock, sputtering system

ATC-Orion 5 UHV with load lock, sputtering system

Veeco DEKTAK 150 Surface Profilometer

Veeco DEKTAK 150 Surface Profilometer

Hitachi TM3000 Tabletop Scanning Electron Microscope

Hitachi TM3000 Tabletop Scanning Electron Microscope

Nikon Ecipse LV100 Microscope

Nikon Ecipse LV100 Microscope

Filmetrics F40-UV Thin film Analyzer

Filmetrics F40-UV Thin film Analyzer

Trion Phantom III DRIE

Trion Phantom III DRIE

Bruce Furnace

Bruce Furnace

Karl Suss Microtec MJB4 Mask Aligner

Karl Suss Microtec MJB4 Mask Aligner

Heidelberg Instruments μPG 101 Mask Maker

Heidelberg Instruments μPG 101 Mask Maker

Plasma etch, Inc. Tabletop Plasma system

Plasma etch, Inc. Tabletop Plasma system

Cascade Tek Vacuum Oven

Cascade Tek Vacuum Oven

QL Vacuum Oven

QL Vacuum Oven

 

Other Equipment

6 wet benches with ventilation

  • 2 with spin coaters, hotplates, nitrogen and DI water
  • 1 with cascade washing, nitrogen, and DI water
  • 2 with nitrogen, DI water, and work space
  • 1 with ultra-sonic baths and hotplates

Equipment Status