Virginia Microelectronics Center

ATC-Orion 5 UHV with load lock, sputtering system

ATC-Orion 5 UHV with load lock, sputtering system

Atomic Layer Deposition

Atomic Layer Deposition

Bruce Furnace

Bruce Furnace

Cascade Tek Vacuum Oven

Cascade Tek Vacuum Oven

E-beam and thermal deposition system

E-beam and thermal deposition system

Filmetrics F40-UV Thin film Analyzer

Filmetrics F40-UV Thin film Analyzer

Heidelberg Instruments μMLA

Heidelberg Instruments μMLA

Heidelberg Instruments μPG 101 Mask Maker

Heidelberg Instruments μPG 101 Mask Maker

Hitachi TM3000 Tabletop Scanning Electron Microscope

Hitachi TM3000 Tabletop Scanning Electron Microscope

Karl Suss Microtec MJB4 Mask Aligner

Karl Suss Microtec MJB4 Mask Aligner

Nikon Eclipse LV100 Microscope

Nikon Ecipse LV100 Microscope

Plasma etch, Inc. Tabletop Plasma system

Plasma etch, Inc. Tabletop Plasma system

QL Vacuum Oven

QL Vacuum Oven

Raith Voyager Electron Beam Lithography

Raith Voyager Electron Beam Lithography

Trion Phantom III DRIE

Trion Phantom III DRIE

Veeco DEKTAK 150 Surface Profilometer

Veeco DEKTAK 150 Surface Profilometer

Other Equipment

6 wet benches with ventilation

  • 2 with spin coaters, hotplates, nitrogen and DI water
  • 1 with cascade washing, nitrogen, and DI water
  • 2 with nitrogen, DI water, and work space
  • 1 with ultra-sonic baths and hotplates