Virginia Microelectronics Center

Manufacturer
AJA International Inc.

ATC-Orion 5 UHV with load lock, sputtering system

Equipment Statistics

Chamber guns	5, 3" guns
Available target materials	Intrinsic Si, Si P-Type, Si N-type, Al/Si, Al, Si3N4, W
Gas type	Ar
Thin film thickness range	Submicron thin film physical vapor deposition