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Trion Phantom III DRIE

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Equipment
Trion Phantom III DRIE

Manufacturer
Trion

Trion Phantom III DRIE

Equipment Statistics

Single wafer of mounted parts size range	3" - 300 mm
Power source	600 watt, 13.56 MHz solid state RF generator

Virginia Commonwealth University

College of Engineering

Virginia Microelectronics Center

601 West Main Street
Box 843068
Richmond, VA 23284-3068

(804) 828-3925

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Updated: 12/08/2023