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Veeco DEKTAK 150 Surface Profilometer

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Veeco DEKTAK 150 Surface Profilometer

Manufacturer
Veeco

Veeco DEKTAK 150 Surface Profilometer

Equipment Statistics

Tip Size	12 μm
Scan length	55 - 200 mm
Maximum data points per scan	120,000
Maximum sample size	200 mm
Stylus force	1 - 15 mg

Virginia Commonwealth University

College of Engineering

Virginia Microelectronics Center

601 West Main Street
Box 843068
Richmond, VA 23284-3068

(804) 828-3925

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Updated: 12/08/2023