ATC-Orion 5 UHV with load lock, sputtering system
Atomic Layer Deposition
Bruce Furnace
Cascade Tek Vacuum Oven
E-beam and thermal deposition system
Filmetrics F40-UV Thin film Analyzer
Heidelberg Instruments μMLA
Heidelberg Instruments μPG 101 Mask Maker
Hitachi TM3000 Tabletop Scanning Electron Microscope
Karl Suss Microtec MJB4 Mask Aligner
Nikon Eclipse LV100 Microscope
Plasma etch, Inc. Tabletop Plasma system
QL Vacuum Oven
Raith Voyager Electron Beam Lithography
Trion Phantom III DRIE
Veeco DEKTAK 150 Surface Profilometer